STRESS AND SENSITIVITY ANALYSIS OF CANTILEVER BASED MEMS SENSOR FOR ENVIRONMENTAL APPLICATIONS

Journal of Research in Engineering and Applied Sciences

A. Nallathambi¹  T. Shanmuganantham¹ 

[1] Department of Electronics Engineering, Pondicherry University, Pondicherry, India.;

关键词: mems;    cantilever;    displacement;    stress and sensitivity;   

DOI  :  https://doi.org/10.46565/jreas.2016.v01i01.003

来源: DOAJ

【 摘 要 】

We present a cantilever based Micro-electromechanical System (MEMS) humidity sensor for applications of environmental monitoring. The main aim of this paper is to design, simulate and analyze the micro cantilever based MEMS sensor such as V, U and Wshaped cantilever using Polyimide sensing material. The performance of metrics such as the maximum induced stress, deflection and sensitivity obtained through the finite element tool have been analyzed using the simulation software INTELLISUITE v8.7. Adesigned Si cantilever humidity sensor based on mechanical principles of displacement analysis is being performed on the sensor. The sensing material as Polyimide is coated over the beam to sense the humidity. When the humidity absorbed by the Polyimide material, the mass of the beam is also increased. The change in humidity element is bending of the micro cantilever that modifies the measured displacement between the substrate and the micro cantilever. With this change in displacement gives the measure of the amount of water vapor present in that environment. Therefore the result of these device studies can be used to enhance the sensitivity and stress. Finally, we observed that the best output displacement, Mises stress and sensitivity responses are obtained from Wshaped cantilever in the range of 10%RH to 100% RH.

【 授权许可】

Unknown