Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

Membranes

卷:12

Millicent N. Gikunda¹  Paul M. Thibado¹  Ferdinand Harerimana¹  James M. Mangum¹  Sumaya Rahman¹  Joshua P. Thompson¹  Hugh O. H. Churchill¹  Charles Thomas Harris² 

[1] Department of Physics, University of Arkansas, Fayetteville, AR 72701, USA;

[2] Sandia National Laboratories, Albuquerque, NM 87123, USA;

关键词: graphene;    photolithography;    wet etching;    variable capacitor;    atomic force microscopy;    critical point drying;   

DOI  :  10.3390/membranes12050533

来源: DOAJ

【 摘 要 】

Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding graphene-based variable capacitors on 100 mm silicon wafers. The first mask forms long trenches terminated by square wells featuring cone-shaped tips at their centers. The second mask fabricates metal traces from each tip to its contact pad along the trench and a second contact pad opposite the square well. A graphene membrane is then suspended over the square well to form a variable capacitor. The same capacitor structures were also built on 5 mm by 5 mm bare dies containing an integrated circuit underneath. We used atomic force microscopy, optical microscopy, and capacitance measurements in time to characterize the samples.

【 授权许可】

Unknown