Micromachined Polycrystalline Si Thermopiles in a T-shirt

Sensors & Transducers

卷:127

Ruud J. M. Vullers¹  Ziyang Wang¹  Chris Van Hoof²  Yvonne van Andel²  Vladimir Leonov² 

[1] Imec / Holst Centre, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands;

[2] Imec, Smart Systems and Energy Technology Unit, Kapeldreef 75, 3001 Leuven, Belgium,;

关键词: Energy harvester;    Energy scavenger;    Thermoelectric generator;    Wearable device;    Micromachining;    MEMS;    Thermopile;   

DOI  :  

来源: DOAJ

【 摘 要 】

The technology for in-plane poly-Si thermopiles has been developed. The bulk-micromachined thermopiles are located between two Si bars and connected thermally with those bars through thin-film thermal shunts. The patterned strips of thermocouple material together with thermal shunts form bridges between Si bars. Two versions of a thermoelectric generator (TEG) with micromachined thermopiles have been assembled and tested on a person’s wrist, and when integrated in a T-shirt. The TEG still produces less than 1 μW in the office, but at ambient temperatures below 11-13 °C it produces more than 1 μW at a voltage of more than 2 V on the matched load. The new way of integration of wearable TEG in clothing is shown. The TEG is located under the textile, and the fabric is used as a flexible radiator.

【 授权许可】

Unknown