Fabrication and Characterization of Aluminum Nitride Nanoparticles by RF Magnetron Sputtering and Inert Gas Condensation Technique

Coatings

卷:10

Hussain Alawadhi¹  Ishaq Musa²  SalehT. Mahmoud³  Khadija Said³  Naser Qamhieh³ 

[1] Center for Advanced Materials Research, University of Sharjah, Sharjah 27272, UAE;

[2] Department of Physics, Palestine Technical University-Kadoorie, P. O. Box 7, Tulkarem 300, Palestine;

[3] Department of Physics, UAE University, Al-Ain 15551, UAE;

关键词: AlN nanoparticles;    RF magnetron sputtering;    atomic force microscopy;    Raman spectroscopy;    UV-visible absorption;   

DOI  :  10.3390/coatings10040411

来源: DOAJ

【 摘 要 】

Aluminum nitride nanoparticles (AlN-NPs) were fabricated by a RF magnetron sputtering and inert gas condensation technique. By keeping the source parameters and sputtering time of 4 h fixed, it was possible to produce AlN-NPs with a size in the range of 2–3 nm. Atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), and UV-visible absorption were used to characterize the obtained AlN-NPs. AFM topography images showed quazi-sphere nanoparticles with a size ranging from 2 to 3 nm. The XRD measurements confirmed the hexagonal wurtzite structure of AlN nanoparticles. Furthermore, the optical band gap was determined by the UV-visible absorption spectroscopy. The Raman spectroscopy results showed vibration transverse-optical modes A₁(TO), E₁(TO), as well as longitudinal-optical modes E₁(LO), A₁(LO).

【 授权许可】

Unknown