Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

Beilstein Journal of Nanotechnology

卷:6

Harald Plank¹  Jason D. Fowlkes²  Michael G. Stanford²  Brett B. Lewis²  Philip D. Rack²  Kevin Lester³ 

[1] Institute for Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;

[2] Materials Science and Engineering Department, University of Tennessee, Knoxville, TN 37996, USA;

[3] Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37381, USA;

关键词: beam induced processing;    direct-write;    electron beam induced deposition;    nano;   

DOI  :  10.3762/bjnano.6.94

来源: DOAJ

【 摘 要 】

Platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.

【 授权许可】

Unknown