Design and performance analysis of integrated focusing grating couplers for the transverse-magnetic TM00 mode in a photonic BiCMOS technology

Journal of the European Optical Society-Rapid Publications

卷:16

Christian Mai¹  Anna Peczek²  Karsten Voigt³  Galina Georgieva³  Lars Zimmermann³ 

[1] IHP – Leibnitz Institut für innovative Mikroelektronik;

[2] IHP – Solutions GmbH;

[3] Technische Universität Berlin;

关键词: Photonic integration;    Integrated waveguides;    Silicon nanowire;    Silicon rib waveguide;    Transverse-magnetic mode;    Focusing grating coupler;   

DOI  :  10.1186/s41476-020-00129-4

来源: DOAJ

【 摘 要 】

Abstract Focusing grating couplers for the excitation of the fundamental transverse-magnetic (TM) mode in integrated silicon photonic waveguides are designed and characterized under the boundary conditions of a photonic BiCMOS foundry. Two types of waveguide geometries are considered – a nanowire and a rib waveguide. Wafer-scale experimental results for nanowire TM grating couplers are in excellent agreement with numerical investigations and demonstrate a robust behavior on the wafer. The mean coupling loss and the 3σ interval are -3.9 ± 0.3 dB. The on wafer variation is three times lower than for the fundamental transverse-electric (TE) polarization. Similarly, the coupling in rib waveguides is examined as well. The results indicate that the rib waveguides require a modified geometry when designed for TM. In general, the nanowire waveguide type is more suitable for TM coupling, showing a stable and repeatable performance.

【 授权许可】

Unknown