Duplex treatment of active screen plasma nitriding and amorphous hydrogenated carbon coating

Applied Surface Science Advances

卷:6

Rei Amano¹  Akio Nishimoto²  Takazumi Tamiya³ 

[1] Corresponding author.;

[2] Department of Chemistry and Materials Engineering, Faculty of Chemistry, Materials and Bioengineering, Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan;

[3] Graduate School of Science and Engineering, Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan;

关键词: Duplex treatment;    Active screen plasma nitriding;    Stainless steel;    S-phase;    Diamond-like carbon;    Amorphous hydrogenated carbon;   

DOI  :  

来源: DOAJ

【 摘 要 】

Active screen plasma nitriding (ASPN) has recently emerged as an alternative nitriding technology with the potential to eliminate problems such as edge effect, arcing, and hollow cathode effects, associated with conventional direct current plasma nitriding technology. Amorphous hydrogenated carbon (a-C:H) is a thin film characterized by high hardness, a low friction coefficient, and superior wear resistance. However, the high residual stress of the a-C:H leads to poor adhesion between the a-C:H film and substrate. This study's objective was to investigate the properties of samples obtained by a duplex treatment (i.e., ASPN and a-C:H coating) of SUS304 austenitic stainless steel. The ASPN treatment was performed in 25% N2 + 75% H2 atmosphere for 5 h at 673 K under 600 Pa. An a-C:H film was coated using RF plasma-enhanced chemical vapor deposition in the presence of methane for 90 min. The results indicated that an a-C:H film with an S-phase interlayer formed after the duplex treatment of ASPN and a-C:H coating. Moreover, this treatment improved the adhesion and wear properties of the resulting sample.

【 授权许可】

Unknown