ANALYSIS OF THE EFFECT OF SOLUTION CHARACTERISTICS ON THE ELECTROPHYSICAL PARAMETERS OF TRANSPARENT CONDUCTIVE OXIDES

Измерение, мониторинг, управление, контроль

V.I. Kondrashin¹  Yu.A. Varenik²  T.O. Zinchenko²  G.V. Kozlov²  E.A. Pecherskaya²  V.S. Alexandrov² 

[1] Paradigm LLC;

[2] Penza State University;

关键词: solution parameters;    tin tetrachloride pentahydrate;    antimony trichloride;    precursor;    impurity;    resistivity;    conductivity;   

DOI  :  10.21685/2307-5538-2021-3-9

来源: DOAJ

【 摘 要 】

Background. The aim of the study is to analyze the effect of the solution parameters on the electrophysicalparameters of transparent conducting oxides during their synthesis by spray pyrolysis. Materials and methods. In the consideredtechnology for the synthesis of transparent conductive oxides by spray pyrolysis, the method of hydrolysis of solutionsof chlorine tin is used. It is convenient for testing and selecting the amount and type of alloying additives toSnO2. The formation of the oxide film is carried out on the heated surface of the substrate by surface hydrolysis of metalchloride. Results. It is shown that one of the important quality parameters of transparent conducting oxides (resistivity,and hence conductivity) is significantly affected by the characteristics of the solution (volume, impurity and its concentration,precursors and their concentration). Conclusions. The results of the experiments and their analysis confirmed that in order to reduce the surface resistance of PPO, it is necessary to increase the volume of the solution, the concentrationof antimony impurities, and the concentration of precursors. Antimony atoms, replacing tin atoms in the lattice,are donors and lead to the formation of excess free electrons and an increase in conductivity.