Sensitivity of quantitative symmetry measurement algorithms for convergent beam electron diffraction technique

Applied Microscopy

Kyou-Hyun Kim¹  Ro Woon Lee¹  Sung Taek Hong¹  Hyeongsub So² 

[1] Korea-Russia Innovation Center, Korea Institute of Industrial Technology, 22004, Incheon, Republic of Korea;Korea-Russia Innovation Center, Korea Institute of Industrial Technology, 22004, Incheon, Republic of Korea;Department of Materials and Science Engineering, Korea University, 02841, Seoul, Republic of Korea;

关键词: Convergence beam electron diffraction;    Symmetry;    Transmission electron microscopy;   

DOI  :  10.1186/s42649-021-00060-z

来源: Springer

【 摘 要 】

We investigate the sensitivity of symmetry quantification algorithms based on the profile R-factor (Rp) and the normalized cross-correlation (NCC) coefficient (γ). A DM (Digital Micrograph©) script embedded in the Gatan digital microscopy software is used to develop the symmetry quantification program. Using the Bloch method, a variety of CBED patterns are simulated and used to investigate the sensitivity of symmetry quantification algorithms. The quantification results show that two symmetry quantification coefficients are significantly sensitive to structural changes even for small strain values of < 1%.

【 授权许可】

CC BY