Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

Nanotechnology Reviews

article

Weiyi Ma¹  Yi Jiang¹  Han Zhang²  Liuchao Zhang¹  Jie Hu³  Lan Jiang³ 

[1] School of Optics and Photonics, Beijing Institute of Technology;Key Laboratory of Noise and Vibration, Institute of Acoustics;Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology

关键词: Extrinsic Fabry–Perot interferometer;    vibration sensor;    fiber optical sensor;    femtosecond laser micromachining;   

DOI  :  10.1515/ntrev-2019-0028

学科分类：社会科学、人文和艺术（综合）

来源: De Gruyter

【 摘 要 】

An on-fiber extrinsic Fabry–Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.

【 授权许可】

CC BY