Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies

Nanophotonics

article

Gediminas Seniutinas¹  Armandas Balčytis²  Ignas Reklaitis⁴  Feng Chen⁵  Jeffrey Davis⁶  Christian David¹  Saulius Juodkazis² 

[1] Paul Scherrer Institute;Centre for Micro-Photonics, Faculty of Science, Engineering and Technology, Swinburne University of Technology;Department of Laser Technologies, Center for Physical Sciences and Technology;Institute of Applied Research, Vilnius University;School of Physics, Shandong University;Centre for Quantum and Optical Science, Faculty of Science, Engineering and Technology, Swinburne University of Technology;Melbourne Centre for Nanofabrication, Australian National Fabrication Facility

关键词: Nanotechnology;    nanofabrication;    nanophotonics;    3D fabrication;    nanoscale;   

DOI  :  10.1515/nanoph-2017-0008

学科分类：社会科学、人文和艺术（综合）

来源: De Gruyter

【 摘 要 】

The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1−100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.

【 授权许可】

CC BY