Nanophotonics | |
Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies | |
article | |
Gediminas Seniutinas1  Armandas Balčytis2  Ignas Reklaitis4  Feng Chen5  Jeffrey Davis6  Christian David1  Saulius Juodkazis2  | |
[1] Paul Scherrer Institute;Centre for Micro-Photonics, Faculty of Science, Engineering and Technology, Swinburne University of Technology;Department of Laser Technologies, Center for Physical Sciences and Technology;Institute of Applied Research, Vilnius University;School of Physics, Shandong University;Centre for Quantum and Optical Science, Faculty of Science, Engineering and Technology, Swinburne University of Technology;Melbourne Centre for Nanofabrication, Australian National Fabrication Facility | |
关键词: Nanotechnology; nanofabrication; nanophotonics; 3D fabrication; nanoscale; | |
DOI : 10.1515/nanoph-2017-0008 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: De Gruyter | |
【 摘 要 】
The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1−100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.
【 授权许可】
CC BY
【 预 览 】
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RO202107200003830ZK.pdf | 1907KB | download |