Formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences

Nanophotonics

article

Wei Liu¹  Hailin Liu¹  Chen Li¹  Suocheng Wang¹  Shaojun Wang¹  Jie Hu¹  Lan Jiang¹  Ji Huang¹  Jiangang Lu²  Jiangang Yin²  Zhaoling Qiu¹ 

[1] Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology;Han’s Laser Technology Centre

关键词: cylindrical wave;    femtosecond laser;    LSFL;    nanometric concentric ring structures;    silicon;   

DOI  :  10.1515/nanoph-2020-0568

学科分类：社会科学、人文和艺术（综合）

来源: De Gruyter

【 摘 要 】

In this study, we report the formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences (OP pulses). The period of the ring structures is marginally smaller than the irradiated laser’s wavelength, which indicates that the structures are a type of low-spatial-frequency laser-induced periodic surface structures. Regular nanometric concentric ring structures can be formed when the time delay between two subpulses is approximately 1 ps (roughly from 500 fs to 1.5 ps) and the number of laser bursts is approximately 4. The formation mechanism of the concentric ring structures is attributed to the surface wave (i.e., cylindrical wave) stimulated by OP pulses through single-spot irradiation is radially distributed. Large area of concentric ring structures eliminating anisotropy in the generation of structural colors was shown in this paper.

【 授权许可】

CC BY