Synergetic surface modification effect of argon and oxygen for diamond films by MPCVD

Green Processing and Synthesis

article

Caiyi Jiang¹  Shenghui Guo⁴  Li Yang⁵  Jiyun Gao⁶  Tu Hu⁴  Jinhui Peng⁵  Libo Zhang⁴ 

[1] State International Joint Research Center of Advanced Technology for Superhard Materials, Kunming University of Science and Technology;National Local Joint Laboratory of Engineering Application of Microwave Energy and Equipment Technology;Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology;State Key Laboratory of Complex Nonferrous Metal Resources Clean Utilization, KunmingUniversity of Science and Technology;State Key Laboratory of Complex Nonferrous Metal Resources Clean Utilization, Kunming University of Science and Technology;School of Chemistry and Environment, Yunnan Minzu University

关键词: diamond films;    MPCVD;    synergetic effect;    surface roughness;   

DOI  :  10.1515/gps-2015-0135

来源: De Gruyter

【 摘 要 】

Diamond films were synthesized in a CH 4 -H 2 system with good surface quality by adjusting the additive amount of argon and oxygen gas. The diamond phase content and surface roughness of samples are 86.1% and 81.5 nm, respectively. The results indicate that only Ar addition will decrease the purity of diamond films, whereas Ar-O 2 mixed gas can further increase the diamond phase content. It is worth noting that the content of diamond phase has no significant increase when O 2 flow exceed 1 sccm. The surface roughness reduced from 199.8 to 81.5 nm by the addition of 14 sccm Ar and 1 sccm O 2 , and the surface quality will be deteriorated in case of further increasing O 2 or decreasing Ar concentration. Meanwhile, the growth rate under different conditions and the synergetic surface modification effect of Ar-O 2 mixed gas for diamond films growth process were discussed.

【 授权许可】

CC BY