Lift-off process of piezoelectric lead–zirconate–titanate thin film using self-assembled monolayer as sacrificial layer

Micro & nano letters

article

Jian Lu¹  Hideki Takagi¹  Ryutaro Maeda¹ 

[1] Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)

关键词: annealing;    contact angle;    crystallisation;    evaporation;    lead compounds;    monolayers;    piezoelectric thin films;    self-assembly;    spin coating;    surface morphology;    thermal stability;    vapour deposition;    X-ray diffraction;    hydrophobicity;    lift-off process;    piezoelectric lead-zirconate-titanate thin film;    sacrificial layer;    hydrophobic self-assembled monolayer;    Pt-Ti-silica-Si substrate;    perfluorodecyltrichlorosilane fine pattern;    vapour deposition;    spin-coating;    solvent decomposition;    solvent evaporation;    annealing;    superhydrophobic perfluorodecyltrichlorosilane;    contact angle;    lead-zirconate-titanate crystallisation;    thermal stability;    lead-zirconate-titanate post-baking;    barrier-effects;    spin-coated lead-zirconate-titanate precursor;    ultrasonic agitation;    lead-zirconate-titanate fine pattern;    hydrophobic properties;    surface morphology;    lead-zirconate-titanate thickness effects;    lead-zirconate-titanate properties;    X-ray diffraction measurement;    XRD;    size 200 nm to 300 nm;    PZT;    Pt/Ti/SiO2/Si;    Si;   

DOI  :  10.1049/mnl.2012.0888

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

It is important to select the proper instructional strategy for a specific learning outcome in teaching engineering. There are two broad types of learning outcomes: facts, rules and action sequences (on lower levels of complexity in the cognitive, affective and psychomotor domains), and concepts, patterns and abstractions (on higher level of complexity in the above named domains). Facts, rules and action sequences are taught using instructional strategies of direct instruction. Concepts, patterns and abstractions are taught using strategies of indirect instruction. Strategies of both types of learning may be combined, providing a menu of teaching strategies that help students solve problems, think critically and work cooperatively. This article presents teaching strategies suitable for direct and indirect instruction used in teaching engineering.

【 授权许可】

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