Fabrication of thin film potentiometric CO 2 sensors on differentiate substrate surfaces and their characteristics

Micro & nano letters

article

Peng Li¹  Guoliang Sun¹  Hairong Wang¹  Zhuangde Jiang¹ 

[1] State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University;School of Mechanical Engineering, Xi'an Jiaotong University

关键词: atomic force microscopy;    carbon compounds;    electric potential;    gas sensors;    lithium compounds;    potentiometers;    rough surfaces;    scanning electron microscopy;    solid electrolytes;    surface roughness;    thermomagnetic effects;    thin film sensors;    thin films;    vacuum deposition;    X-ray diffraction;    thin film potentiometric sensors;    differentiate substrate surfaces;    planar-type potentiometric gas sensors;    thermal evaporated thin film;    solid electrolyte;    alumina plates;    rough surface;    smooth surface;    X-ray diffraction;    atomic force microscopy;    scanning electron microscopy;    sensing properties;    rough substrate-based sensor;    r-sensor;    smooth substrate-sensor;    s-sensor;    Nernst behaviour;    output electromotive force;    stable signal;    EMF-decade values;    recovery time;    response time;    substrate surface roughness;    response properties;    temperature 480 degC;    CO2;    Li3PO4;    Al2O3;   

DOI  :  10.1049/mnl.2013.0256

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Two kinds of planar-type potentiometric CO 2 gas sensors using thermal evaporated Li 3 PO 4 thin film as solid electrolyte were fabricated. Alumina plates with rough and smooth surfaces were used as the substrates of the sensors. X-ray diffraction analysis, atomic force microscopy and scanning electron microscopy were used to characterise the Li 3 PO 4 films. The sensing properties were investigated in the range of 500–5000 ppm CO 2 concentrations at 480°C. Both the rough substrate-based sensor (r-sensor) and the smooth substrate-based sensor (s-sensor) were sensitive to CO 2 gas and showed a good Nernst behaviour. The output electromotive force (EMF) of the s-sensor showed a more stable signal than the r-senor. The ΔEMF/decade values obtained from the r-sensor and the s-sensor were 45 and 55 mV/decade, respectively. The response and recovery time were not primarily influenced by the electrolyte film. It was found that the sensitivity of the s-sensor was closer to the theoretical value. The results revealed that the substrate surface roughness may influence the characteristics of Li 3 PO 4 film and the response properties of the sensors to CO 2 .

【 授权许可】

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