Micromachined catalytic combustion type gas sensor for hydrogen detection

Micro & nano letters

article

Xifeng Liu¹  Hanpeng Dong³  Shanhong Xia³ 

[1] Beijing Automation Technical Research Institute, Beijing Instrument Industry Group Co. Ltd;Institute of Microelectronics, Tsinghua University;State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences

关键词: catalysis;    chemical vapour deposition;    combustion;    electrical resistivity;    electron beam deposition;    gas sensors;    hafnium compounds;    hydrogen;    insulating thin films;    micromachining;    microsensors;    semiconductor materials;    thin film sensors;    tin compounds;    vacuum deposition;    micromachined catalytic combustion type gas sensor;    hydrogen detection;    microelectromechanical system;    hafnium oxide thin films;    insulating layer;    electron beam evaporation;    semiconductor combustion catalyst;    tin oxide layer;    chemical vapour deposition;    semiconductor material;    catalytic combustion gas sensor;    resistivity;    sensing elements;    reference elements;    Wheatstone configuration;    low-power consumption;    operating voltage;    relative sensitivity;    hydrogen concentrations;    temperature 900 degC;    voltage 4 V;    H2;    HfO2;    SnO2;   

DOI  :  10.1049/mnl.2013.0468

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

A 55-year old male patient with history of smoking for the past 30-years presents to emergency room with complains of respiratory distress since 2-days. On examination his respiratory rate is 30/min with accessory muscles of respiration at work. His SpO2 is 82% on room air. He is administered O2 via face mask with reservoir bag @ 5 L/min and improvement in SpO2 observed is 90%. His is therefore administered a trial of BIPAP and his condition stabilizes over next few hours.

【 授权许可】

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