Two-dimensional silicon-on-glass actuator combined with a dispensed polymer microlens

Micro & nano letters

article

Pei Li¹  Longfa Pan¹  Hans Zappe² 

[1] Department of Precision Instruments and Mechanology, Tsinghua University;Department of Microsystems Engineering – IMTEK, University of Freiburg

关键词: actuators;    bonding processes;    glass;    microactuators;    microlenses;    optical storage;    silicon;    two-dimensional silicon-on-glass actuator;    objective lens positioning;    writing data;    reading data;    optical storage media;    technical capability;    microlens actuators;    optical heads;    MEMS technology;    optical data storage systems;    compact silicon-on-glass actuator;    two-dimensional positioning;    wafer-level process;    anodic bonding;    pyrex wafer;    ultra-thin silicon wafer;    dispensed polymer microlenses;    2D actuator;    automatic handling system;    typical displacements;    2D SOG actuator;    assembly technology;   

DOI  :  10.1049/mnl.2013.0248

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Background and Objectives: Pain assessment is very important in these patients, but no comprehensive systematic reviews / meta-analyses (SRs/MAs) have been performed so far. For this reason, this study was performed to determine the prevalence of pain in patients with Covid-19 in the world by SR/MA method.

【 授权许可】

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