Multi-resonant capacitive microelectromechanical system switch with high isolation for ultra-wideband applications

Micro & nano letters

article

Min Kyu Yoon¹  Seong Jong Cheon¹  Jae Y. Park¹ 

[1] Department of Electronic Engineering, Kwangwoon University

关键词: aluminium compounds;    capacitance;    dielectric losses;    high-k dielectric thin films;    inductance;    inductors;    membranes;    microswitches;    permittivity;    microfabrication;    multiresonant capacitive microelectromechanical system switch;    ultrawideband applications;    wide operation frequency bandwidth;    capacitive shunt-connected membranes;    meander-shaped inductors;    inductances;    serial connection;    on/off capacitance ratio;    high dielectric aluminium nitride film;    AlN film;    dielectric relative constant;    tangent loss;    on state;    off state;    resonant frequencies;    isolation performances;    frequency 4 GHz to 10 GHz;    AlN;   

DOI  :  10.1049/mnl.2013.0302

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Many embark on the dream of the white coat often without knowing that the life of a doctor implies great personal costs. Doctors, like other professionals, are at risk inherent in the nature of the work and the environment in which it is carried out. The anesthesiologist is no exception to the rule and is exposed to an unhealthy environment when caring for patients and dedicating themselves to them, they are often exposed to the action of harmful agents.

【 授权许可】

CC BY|CC BY-ND|CC BY-NC|CC BY-NC-ND