Fabrication and thermal stability characterisation of Ru electrode used for high power contact radio frequency microelectromechanical system switch

Micro & nano letters

article

Hongze Zhang¹  Wei Wang¹  Zhihong Li¹ 

[1] National Key Laboratory of Nano/Micro Fabrication Technology, Peking University

关键词: electrical contacts;    electrochemical electrodes;    gold;    micromechanical devices;    ruthenium;    scanning electron microscopy;    thermal stability;    titanium;    X-ray chemical analysis;    microfabrication;    thermal stability characterisation;    electrode;    high power contact radiofrequency microelectromechanical system switching;    microspring contact design;    bilayer lift-off layer;    strain release layer;    smooth edges;    high-power handling capacity;    thermal testing;    surface scanning electron microscopy;    energy dispersive X-ray spectroscopy;    high-power handling;    cold switch DC current handling capacity;    temperature 400 degC;    temperature 500 degC;    temperature 600 degC;    time 1 h;    Ti-Au-Ru;   

DOI  :  10.1049/mnl.2013.0300

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Past few weeks have  been a challenging time for all the health care workers, especially those who are front liners and directly involved in the management of Corona patient during this pandemic time. As this is a new experience for all of us, hence one can feel the fear and uncertainty in the management of these patients. As intensive care physicians, what we are offering in our hospital at present is to review these patients on the Covid ward in a view to assess them for a need of ventilatory requirement. If they are in need of invasive ventilation then they are brought to a specific area in theatre for intubation and ventilation with all the necessary precautions and preparations. These patients are not currently offered any of the non invasive interventions which are  normally offered to  non-covid patients such as Nasal high flow oxygen, CPAP or BIPAP as these can be aerosol generating.

【 授权许可】

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