Design of CMOS-MEMS broadband infrared emitter arrays integrated with metamaterial absorbers based on CMOS back-end-of-line

Micro & nano letters

article

Zhengxi Cheng¹  Hiroshi Toshiyoshi¹ 

[1] Research Center for Advanced Science and Technology, The University of Tokyo;Shanghai Institute of Technical Physics, Chinese Academy of Sciences

关键词: CMOS integrated circuits;    optical arrays;    integrated optics;    optical metamaterials;    optical design techniques;    micro-optomechanical devices;    emissivity;    MIM devices;    surface plasmon resonance;    polaritons;    finite element analysis;    CMOS-MEMS broadband infrared emitter arrays;    CMOS back-end-of-line;    complementary metal-oxide-semiconductor microelectromechanical systems;    integrated metamaterial absorbers;    thermal radiation source;    integrated gas sensors;    2-poly-3-metal CMOS process;    trilayer metal-insulator-metal metamaterial absorbers;    four-layer insulator-MIM metamaterial absorbers;    interlayer dielectrics;    multimode surface plasmon polariton resonances;    finite-element method;    FEM;    Planck radiation law;    simulated emissivity spectra;    frequency 344 Hz;   

DOI  :  10.1049/mnl.2016.0275

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

All anesthesiologists performing subarachnoid block should be familiar with the possible sources of contamination during the procedure and means to prevent them. Despite following stringent practices of asepsis by the anesthesia care givers there can still be a rare possibility of iatrogenic meningitis due to the spinal anesthesia. We report a rare case of aseptic meningitis succeeding subarachnoid block in our institute, probably by hyperbaric bupivacaine, injected in the subarachnoid space and its subsequent management.

【 授权许可】

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