Fabrication method for annular/shielded copper interconnects

Micro & nano letters

article

Stephen Adamshick¹  John Burke¹  Michael Liehr² 

[1] Electrical and Computer Engineering Department, Western New England University;SUNY Polytechnic Institute, College of Nanoscale Engineering

关键词: copper;    silicon compounds;    tantalum compounds;    integrated circuit interconnections;    scanning electron microscopy;    electroplating;    chemical mechanical polishing;    oxidation;    diffusion;    TaN;    SiN;    Cu;    diffusion-oxidation barrier;    copper damascene processing;    tantalum nitride;    silicon nitride;    high frequency electrical measurements;    scanning electron microscopy;    shielded copper interconnects;    annular copper interconnects;    chip copper interconnects;   

DOI  :  10.1049/mnl.2016.0462

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Atrial septal defect (ASD) is the most common congenital acyanotic heart disease in adults and accounts for 10%of congenital cardiac defects in adults. . It is the most commonly seen congenital cardiac lesion in women of childbearingage and the pregnancy is usually well tolerated. Pulmonary hypertension is defined as a mean pulmonaryarterial pressure greater than 25mm Hg at rest or greater than 30mm Hg during exercise. We report a case of alarge ASD with mild pulmonary hypertension in a patient who underwent emergency caesarean section undergeneral anaesthesia for failure to progress. During the general anaesthesia for the procedure our objectives wereto to avoid hypotension, hypoxaemia, hypercarbia, hypothermia, reversal of shunt (Eisenmenger’s syndrome)and fluid overload. The patient had an eventful perioperative course and discharged from the hospital on the 8thpostoperative day in good physical condition.

【 授权许可】

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