UV irradiation-promoted wet etching of ZnO nanorods to nanotubes

Micro & nano letters

article

Fan Zhou¹  Weixuan Jing¹  Qi Mao¹  Shu Liu¹  Yaxing Xu¹  Feng Han¹  Zhengying Wei¹  Zhuangde Jiang¹ 

[1] State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University

关键词: vacancies (crystal);    semiconductor nanotubes;    zinc compounds;    etching;    wide band gap semiconductors;    nanorods;    semiconductor growth;    nanofabrication;    II-VI semiconductors;    liquid phase deposition;    UV irradiation-promoted wet etching;    ZnO nanorods;    ZnO nanotubes;    Au cylindrical spirals;    hydrothermal decomposition;    chemical etching;    oxygen vacancies;    tubular structures;    ZnO;    Au;   

DOI  :  10.1049/mnl.2019.0483

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

In this work, UV irradiation was introduced to promote the etching process of ZnO nanorods towards nanotubes. The ZnO nanorods with different diameters were grown on Au cylindrical spirals via hydrothermal decomposition, and then in the presence of UV irradiation, they were chemically etched to nanotubes. The results indicate that the ZnO nanorods with the larger diameter are easily etched to nanotubes due to enough oxygen vacancies (a kind of defect) within the centre parts, but the ZnO nanorods with the smaller diameter are difficult to form tubular structures because of the insufficient oxygen vacancies. With the introduction of UV irradiation, more oxygen vacancies are produced in the ZnO nanorods and hence, the nanorods with the larger diameter are etched more quickly, and the nanorods with the smaller diameter are etched more easily. Additionally, the UV light with the shorter wavelength is more beneficial for the formation of the ZnO nanotubes than the one with the longer wavelength. The results benefit the wet etching of ZnO nanorods towards nanotubes, especially those with smaller diameters.

【 授权许可】

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