Journal of the Brazilian Chemical Society | |
Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides | |
F. Paulo Rouxinol1  B. Cláudio Trasferetti1  Richard Landers1  Mário A. Bica De Moraes1  | |
[1] ,Universidade Estadual de Campinas Instituto de Física 'Gleb Wataghin' Campinas SP ,Brazil | |
关键词: WO3; MoO3; thin films; XPS; CVD; | |
DOI : 10.1590/S0103-50532004000200026 | |
来源: SciELO | |
【 摘 要 】
This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From reactions between oxygen and the heated metal filament, volatile oxide species, Me xOy, where Me is the metal, can be formed, condensing on a nearby substrate. We have observed that thin films of WxOy and Mo xOy can be satisfactorily deposited by this novel method. Although several techniques were used to characterize the oxides, this note emphasizes the results obtained by X-ray Photoelectron Spectroscopy (XPS).
【 授权许可】
CC BY
All the contents of this journal, except where otherwise noted, is licensed under a Creative Commons Attribution License
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