期刊论文详细信息
Química Nova
Confecção de um perfurador de lamínulas de vidro por corrosão ácida
Heron Dominguez Torres Da Silva1  Claudimir Lucio Do Lago1 
[1] ,Universidade de São Paulo Instituto de Química Departamento de Química FundamentalSão Paulo SP
关键词: microfabrication;    micro total analysis system;    drilling;    glass plate;   
DOI  :  10.1590/S0100-40422003000200022
来源: SciELO
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【 摘 要 】

A simple device for glass plate drilling, which is an important step in microfabrication procedures, is described. A reservoir of concentrated hydrofluoric acid with a hole in its bottom is affixed against the glass plate. Leakage is prevented by using a neoprene O-ring. A plastic pipet tip inserted in the reservoir, close to the corrosion region, provides forced convection by pressure variations inside it. A device to make 5 simultaneous holes in a plate is also presented. For a 140 µm thickness alkaline glass lamina and 1/8" O-ring, 5 holes are drilled in 20 min.

【 授权许可】

CC BY-NC   
 All the contents of this journal, except where otherwise noted, is licensed under a Creative Commons Attribution License

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