Multiparametric Porous Silicon Sensors

Sensors

C. Baratto¹  G. Faglia³  G. Sberveglieri³  Z. Gaburro²  L. Pancheri²  C. Oton² 

[1] Department of Physics and INFM, University of Trento, via Sommarive 14, I-38050 Povo (Tn) Italy;Department of Chemistry and Physics, University of Brescia, Via Valotti 9 25133 Brescia, Italy. Tel. [phone], Fax [phone]

关键词: Porous silicon;    Optical microcavity;    Gas sensor;    Nitrogen dioxide;   

DOI  :  10.3390/s20300121

来源: mdpi

【 摘 要 】

We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conductance, the photoluminescence intensity, and the wavelength of the optical resonance. We monitored the change of these three parameters as a function of NO₂ (0.5-5 ppm), ethanol (300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the examined species affect the parameters in a different way, both as a relative change and as dynamic.

【 授权许可】

Unknown   
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