Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell#

Sensors

Arshak Poghossian¹  Kerstin Schumacher¹  Joachim P. Kloock¹  Christian Rosenkranz²  Joachim W. Schultze²  Mattea Müller-Veggian¹ 

[1] Aachen University of Applied Sciences, Jülich Campus, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, 52428 Jülich, Germany;AGEF e.V.-Institute, Heinrich-Heine University, 40225 Düsseldorf, Germany

关键词: ISFET;    wafer-level testing;    capillary micro-droplet cell;   

DOI  :  10.3390/s6040397

来源: mdpi

【 摘 要 】

A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.

【 授权许可】

Unknown   
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