Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates

Sensors

Romesh C. Batra²  Maurizio Porfiri¹ 

[1]Department of Mechanical & Aerospace Engineering, Polytechnic University, Brooklyn, NY 11201, USA E-mail:

[2]Department of Engineering Science & Mechanics, Virginia Polytechnic Institute & State University, Blacksburg, VA 24061, USA E-mail:

关键词: Microelectromechanical systems;    microplate;    van der Waals force;    pull-in instability;    microsensor;   

DOI  :  10.3390/s8021048

来源: mdpi

【 摘 要 】

We study the influence of von Kármán nonlinearity, van der Waals force, and thermal stresses on pull-in instability and small vibrations of electrostatically actuated microplates. We use the Galerkin method to develop a tractable reduced-order model for electrostatically actuated clamped rectangular microplates in the presence of van der Waals forces and thermal stresses. More specifically, we reduce the governing two-dimensional nonlinear transient boundary-value problem to a single nonlinear ordinary differential equation. For the static problem, the pull-in voltage and the pull-in displacement are determined by solving a pair of nonlinear algebraic equations. The fundamental vibration frequency corresponding to a deflected configuration of the microplate is determined by solving a linear algebraic equation. The proposed reduced-order model allows for accurately estimating the combined effects of van der Waals force and thermal stresses on the pull-in voltage and the pull-in deflection profile with an extremely limited computational effort.

【 授权许可】

Unknown   
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