Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor

Sensors

Rui Wang¹  Francis Tsow¹  Xuezhi Zhang²  Jhih-Hong Peng³  Erica S. Forzani¹  Yongsheng Chen²  John C. Crittenden²  Hugo Destaillats² 

[1]Biodesign Institute, Arizona State University, Tempe, AZ, 85287-5801 USA

[2]School of Sustainable Engineering and the Built Environment, Arizona State University, Tempe, AZ, 85287-5801 USA

[3]Department of Electrical Engineering, Arizona State University, Tempe, AZ, 85287-5801 USA

关键词: ozone;    environmental;    epidemiological;    population;    real-time;    selective;    sensitive;    sensor;    wearable;    wireless;   

DOI  :  10.3390/s90705655

来源: mdpi

【 摘 要 】

A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With a mass detection limit of ∼2 pg/mm² and response time of 1 second, the sensor coated with a polymer sensing material can detect ppb-level ozone in air. The sensor is integrated into a miniaturized wearable device containing a detection circuit, filtration, battery and wireless communication chip, which is ideal for personal and microenvironmental chemical exposure monitoring.

【 授权许可】

CC BY   
© 2009 by the authors; licensee MDPI, Basel, Switzerland