Multi-Walled Carbon Nanotube-Doped Tungsten Oxide Thin Films for Hydrogen Gas Sensing

Sensors

Chatchawal Wongchoosuk²  Anurat Wisitsoraat¹  Ditsayut Phokharatkul¹  Adisorn Tuantranont¹ 

[1] Nanoelectronics and MEMS Laboratory, National Electronics and Computer Technology Center, Klong Luang, Pathumthani 12120, Thailand; E-Mails:;Department of Physics and Center of Nanoscience and Nanotechnology, Faculty of Science, Mahidol University, Ratchathewee, Bangkok 10400, Thailand; E-Mail:

关键词: WO₃;    hydrogen sensor;    nanochannels;    E-beam evaporation;    carbon nanotube;   

DOI  :  10.3390/s100807705

来源: mdpi

【 摘 要 】

In this work we have fabricated hydrogen gas sensors based on undoped and 1 wt% multi-walled carbon nanotube (MWCNT)-doped tungsten oxide (WO₃) thin films by means of the powder mixing and electron beam (E-beam) evaporation technique. Hydrogen sensing properties of the thin films have been investigated at different operating temperatures and gas concentrations ranging from 100 ppm to 50,000 ppm. The results indicate that the MWCNT-doped WO₃ thin film exhibits high sensitivity and selectivity to hydrogen. Thus, MWCNT doping based on E-beam co-evaporation was shown to be an effective means of preparing hydrogen gas sensors with enhanced sensing and reduced operating temperatures. Creation of nanochannels and formation of p-n heterojunctions were proposed as the sensing mechanism underlying the enhanced hydrogen sensitivity of this hybridized gas sensor. To our best knowledge, this is the first report on a MWCNT-doped WO₃ hydrogen sensor prepared by the E-beam method.

【 授权许可】

CC BY   
© 2010 by the authors; licensee MDPI, Basel, Switzerland.