Novel Designs for Application Specific MEMS Pressure Sensors

Sensors

Giulio Fragiacomo¹  Kasper Reck¹  Lasse Lorenzen² 

[1] Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, DK-2800 Kgs. Lyngby, Denmark;

关键词: micromachined;    pressure;    capacitive;    optical;    wireless;    silicon;    MEMS;    MOEMS;   

DOI  :  10.3390/s101109541

来源: mdpi

【 摘 要 】

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.

【 授权许可】

CC BY   
© 2010 by the authors; licensee MDPI, Basel, Switzerland.