Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†

Sensors

Yannick Fournier¹  Thomas Maeder²  Grégoire Boutinard-Rouelle²  Aurélie Barras²  Nicolas Craquelin² 

[1] Laboratoire de Production Microtechnique (LPM), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland;

关键词: LTCC;    integrated multisensor;    pressure;    flow;    temperature;    SMD mounting;   

DOI  :  10.3390/s101211156

来源: mdpi

【 摘 要 】

We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.

【 授权许可】

CC BY   
© 2010 by the authors; licensee MDPI, Basel, Switzerland.