SnO2/Pt Thin Film Laser Ablated Gas Sensor Array

Sensors

Mohammad Hadi Shahrokh Abadi¹  Mohd Nizar Hamidon¹  Abdul Halim Shaari²  Norhafizah Abdullah³ 

[1] Electrical and Electronic Department, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia; E-Mails:;Physics Department, Science Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia; E-Mail:;Department of Chemical & Environmental Engineering, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia; E-Mail:

关键词: gas sensor;    thin film;    pulse laser ablation deposition;    screen printing;    tin oxide;    platinum;   

DOI  :  10.3390/s110807724

来源: mdpi

【 摘 要 】

A gas sensor array was developed in a 10 × 10 mm² space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO₂ and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O₂. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.

【 授权许可】

CC BY   
© 2011 by the authors; licensee MDPI, Basel, Switzerland.