A Single-Walled Carbon Nanotube Network Gas Sensing Device

Sensors

Li-Chun Wang¹  Kea-Tiong Tang⁴  I-Ju Teng¹  Cheng-Tzu Kuo¹  Cheng-Long Ho³  Han-Wen Kuo³  Tseng-Hsiung Su³  Shang-Ren Yang⁴  Gia-Nan Shi² 

[1] Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30013, Taiwan; E-Mails:;Department of Applied Chemistry & Materials Science, Chung Cheng Institute of Technology, National Defense University, Taoyuan 33448, Taiwan; E-Mails:;Analytical Chemistry Section, Chung-Shan Institute of Science & Technology, Hsinchu 30325, Taiwan; E-Mails:;Department of Electrical Engineering, National Tsing Hua University, No. 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan; E-Mail:

关键词: single-walled carbon nanotube (SWCNT) networks;    gas sensing device;    chemical vapors;   

DOI  :  10.3390/s110807763

来源: mdpi

【 摘 要 】

The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al₂O₃-deposted SiO₂/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO₂ and NH₃ vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO₂ and 24 ppm for NH₃.

【 授权许可】

CC BY   
© 2011 by the authors; licensee MDPI, Basel, Switzerland.