Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array

Sensors

Francisco López-Huerta¹  Agustín L. Herrera-May⁵  Johan J. Estrada-López³  Carlos Zuñiga-Islas²  Blanca Cervantes-Sanchez⁴  Enrique Soto⁴ 

[1] Facultad de Ciencias Físico Matemáticas, Benemérita Universidad Autónoma de Puebla, Av. San Claudio y Río Verde, Col. San Manuel, 72570, Puebla, Puebla, Mexico;Instituto Nacional de Astrofísica, Óptica y Electrónica, Calle Luis Enrique Erro 1, 72840, Tonazintla, Puebla, Mexico; E-Mail:;Facultad de Matemáticas, Universidad Autónoma de Yucatán, Anillo Periférico Norte, Tablaje Cat., 13613, Col. Chuburná Hidalgo Inn, Merida, Yucatán, Mexico; E-Mail:;Instituto de Fisiología, Benemérita Universidad Autónoma de Puebla, Av. San Claudio 6301, Col. San Manuel, 72570, Puebla, Puebla, México; E-Mails:;Centro de Investigación en Micro y Nanotecnología, Universidad Veracruzana, Calzada Ruiz Cortines 455, 94292, Boca del Río, Veracruz, Mexico; E-Mail:

关键词: CMOS chip;    microelectrode array;    CMOS post-process;    vestibular ganglion neurons;   

DOI  :  10.3390/s111110940

来源: mdpi

【 摘 要 】

We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 μm CMOS standard process and it has 12 pMEA through a 4 × 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p⁺-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm² silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications.

【 授权许可】

CC BY   
© 2011 by the authors; licensee MDPI, Basel, Switzerland.