A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

Sensors

Rok Zaplotnik¹  Alenka Vesel² 

[1] Jozef Stefan Institute, Jamova 39, Ljubljana 1000, Slovenia;Center of Excellence for Polymer Materials and Technologies, Tehnoloski Park 24, Ljubljana 1000, Slovenia; E-Mails:

关键词: fiber optic catalytic probe;    plasma probes;    atom measurement;    oxygen plasma;   

DOI  :  10.3390/s120403857

来源: mdpi

【 摘 要 】

The presented sensor for neutral oxygen atom measurement in oxygen plasma is a catalytic probe which uses fiber optics and infrared detection system to measure the gray body radiation of the catalyst. The density of neutral atoms can be determined from the temperature curve of the probe, because the catalyst is heated predominantly by the dissipation of energy caused by the heterogeneous surface recombination of neutral atoms. The advantages of this sensor are that it is simple, reliable, easy to use, noninvasive, quantitative and can be used in plasma discharge regions. By using different catalyst materials the sensor can also be applied for detection of neutral atoms in other plasmas. Sensor design, operation, example measurements and new measurement procedure for systematic characterization are presented.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland