Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels

Micromachines

Tomokazu Takahashi¹  Masto Suzuki²  Shota Iwamoto² 

[1] Department of Mechanical Engineering, Kansai University, 3-3-35 Yamate-cho, Suita-shi, Osaka 564-8680, Japan;

关键词: tactile sensor;    Parylene on liquid deposition;    dielectric oil;   

DOI  :  10.3390/mi3020270

来源: mdpi

【 摘 要 】

We propose a concept of a flexible sensor array using a novel capacitive force sensor not having a vulnerable electrode on the force applied site. It has a polymer domed structure inside which silicone oil is contained. When the force is applied, the oil is pushed into the surrounding thin channels, where the change in capacitance due to the inflowing dielectric oil is measured between two electrodes on the top and bottom surfaces of the channel. Since the channel does not have a directly applied external force to it, the electrodes do not suffer from damage problems. The change in capacitance was simulated using a simplified flow model. The first trial device of the sensing element has been fabricated. A sensitivity of 0.05 pF/gf was achieved.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.