A Method for Evaluating the Electro-Mechanical Characteristics of Piezoelectric Actuators during Motion

Sensors

Tao Jin¹  Akihiro Takita¹  Mitra Djamal³  Wenmei Hou²  Hongzhi Jia² 

[1] Department of Electronic Engineering, Faculty of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan; E-Mails:;Shanghai Key Laboratory of Modern Optical System, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China; E-Mail:;Department of Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Jalan Ganesa 10, Bandung 40132, Indonesia; E-Mail:

关键词: piezo actuator;    Doppler frequency shift;    dynamic measurement;    interferometer;   

DOI  :  10.3390/s120911559

来源: mdpi

【 摘 要 】

The electro-mechanical characteristics of piezoelectric actuators which have being driven are evaluated in this paper. The force generated by actuators is measured as an inertial force of a corner cub prism which is attached to the actuators. The Doppler frequency shift of a laser beam, due to the motion of actuator, is accurately measured by a heterodyne interferometer. Subsequently, the mechanical quantities, such as velocity, acceleration, force, power and displacement, are calculated from the Doppler frequency shift. With the measurement results of current and voltage of the actuator, the relationships between electrical and mechanical characteristics are evaluated.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.