Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

Sensors

Aldo Ghisi¹  Stefano Mariani¹  Alberto Corigliano¹ 

[1] Dipartimento di Ingegneria Strutturale, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy; E-Mails:

关键词: MEMS inertial sensors;    reduced order modelling;    shocks and drops;    polysilicon;   

DOI  :  10.3390/s121013985

来源: mdpi

【 摘 要 】

In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of freedom model of the movable parts of the sensor is adopted. The capability and the accuracy of the model are assessed against three-dimensional finite element simulations, and against outcomes of experiments on instrumented samples. It is shown that the reduced order model provides accurate outcomes as for the system dynamics. To also get rather accurate results in terms of stress fields within regions that are prone to fail upon high-g shocks, a correction factor is proposed by accounting for the local stress amplification induced by re-entrant corners.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.