Design, Fabrication and Characterization of a Low-Impedance 3D Electrode Array System for Neuro-Electrophysiology

Sensors

Mihaela Kusko²  Florea Craciunoiu²  Bogdan Amuzescu¹  Ferdinand Halitzchi¹  Tudor Selescu¹  Antonio Radoi²  Marian Popescu²  Monica Simion²  Adina Bragaru² 

[1] Department of Biophysics and Physiology, Faculty of Biology, University of Bucharest, Splaiul Independentei 91-95, 005095 Bucharest, Romania; E-Mails:;Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania; E-Mails:

关键词: 3D electrodes;    MEA;    fabrication;    electrochemical characterization;    neuro-electrophysiology tests;   

DOI  :  10.3390/s121216571

来源: mdpi

【 摘 要 】

Recent progress in patterned microelectrode manufacturing technology and microfluidics has opened the way to a large variety of cellular and molecular biosensor-based applications. In this extremely diverse and rapidly expanding landscape, silicon-based technologies occupy a special position, given their statute of mature, consolidated, and highly accessible areas of development. Within the present work we report microfabrication procedures and workflows for 3D patterned gold-plated microelectrode arrays (MEA) of different shapes (pyramidal, conical and high aspect ratio), and we provide a detailed characterization of their physical features during all the fabrication steps to have in the end a reliable technology. Moreover, the electrical performances of MEA silicon chips mounted on standardized connector boards via ultrasound wire-bonding have been tested using non-destructive electrochemical methods: linear sweep and cyclic voltammetry, impedance spectroscopy. Further, an experimental recording chamber package suitable for in vitro electrophysiology experiments has been realized using custom-design electronics for electrical stimulus delivery and local field potential recording, included in a complete electrophysiology setup, and the experimental structures have been tested on newborn rat hippocampal slices, yielding similar performance compared to commercially available MEA equipments.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland