Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors

Sensors

Cinzia Caliendo²  Arnaldo Dɺmico¹ 

[1] Dipartimento di Ingegneria Elettronica, Università di Tor Vergata, Via del Politecnico 1, 00133 Roma, Italy; E-Mail:;Istituto dei Sistemi Complessi, ISC-CNR, Via Salaria Km. 29.300, Monterotondo Scalo, 00015 Roma, Italy

关键词: AlN;    SiC;    suspended membranes;    S₀ Lamb mode;    thermal stability;    sensors;   

DOI  :  10.3390/s130100550

来源: mdpi

【 摘 要 】

The propagation of the fundamental quasi-symmetric Lamb mode S₀ travelling along 3C-SiC/c-AlN composite plates is theoretically studied with respect to the AlN and SiC film thickness, the acoustic wave propagation direction and the electrical boundary conditions. The temperature effects on the phase velocity have been considered for four AlN/SiC-based electroacoustic coupling configurations, specifically addressing the design of temperature-compensated, enhanced-coupling, GHz-range electroacoustic devices. The gravimetric sensitivity and resolution of the four temperature-stable SiC/AlN composite structures are theoretically investigated with respect to both the AlN and SiC sensing surface. The SiC/AlN-based sensor performances are compared to those of surface acoustic waves and Lamb S₀ mode mass sensors implemented on bulk conventional piezoelectric materials and on thin suspended membranes.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.