A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes

Sensors

Chong Feng²  Zhenan Tang²  Jun Yu¹ 

[1] School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116023, China;

关键词: MEMS;    freestanding membrane;    near-field;    thermal radiation;   

DOI  :  10.3390/s130201998

来源: mdpi

【 摘 要 】

For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors' thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 μm. After evaluating the electrical and thermal characteristics of the lower freestanding membrane,experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.