A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process

Sensors

Guan-Ming Lin²  Ching-Liang Dai¹ 

[1] Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan;

关键词: integrtaed ammonia microsensor;    zirconium dioxide;    readout circuit;    CMOS;   

DOI  :  10.3390/s130303664

来源: mdpi

【 摘 要 】

The study presents an ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated sensor chip consists of a heater, an ammonia sensor and a readout circuit. The ammonia sensor is constructed by a sensitive film and the interdigitated electrodes. The sensitive film is zirconium dioxide that is coated on the interdigitated electrodes. The heater is used to provide a working temperature to the sensitive film. A post-process is employed to remove the sacrificial layer and to coat zirconium dioxide on the sensor. When the sensitive film adsorbs or desorbs ammonia gas, the sensor produces a change in resistance. The readout circuit converts the resistance variation of the sensor into the output voltage. The experiments show that the integrated ammonia sensor has a sensitivity of 4.1 mV/ppm.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.