Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Materials

Bao Q. Ta¹  Tormod B. Haugen¹  Nils Hoivik¹  Einar Halvorsen¹ 

[1] Department of Micro and Nano Systems Technology (IMST), Vestfold University College (HiVe), P.O. Box 2243, Tonsberg N-3130, Norway;

关键词: carbon nanotubes;    defects;    disorder;    local synthesis;    scanning transmission electron microscopy;   

DOI  :  10.3390/ma6083160

来源: mdpi

【 摘 要 】

Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy—S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs: high temperature favors thin and regular structures, whereas low temperature favors “bamboo-like" structures.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.