Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

Sensors

Zengling Ran¹  Shan Liu²  Qin Liu¹  Ya Huang²  Haihong Bao²  Yanjun Wang²  Shucheng Luo²  Huiqin Yang² 

[1] Key Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, China;

关键词: high pressure sensing;    high temperature sensing;    laser micromachining;    micro-cavity;    simultaneous measurement;   

DOI  :  10.3390/s140814330

来源: mdpi

【 摘 要 】

Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ∼0.0779 nm/°C and ∼1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ∼32.3 nm/°C and ∼24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.