Sensors | |
Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure | |
Zengling Ran1  Shan Liu2  Qin Liu1  Ya Huang2  Haihong Bao2  Yanjun Wang2  Shucheng Luo2  Huiqin Yang2  | |
[1] Key Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, China; | |
关键词: high pressure sensing; high temperature sensing; laser micromachining; micro-cavity; simultaneous measurement; | |
DOI : 10.3390/s140814330 | |
来源: mdpi | |
【 摘 要 】
Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ∼0.0779 nm/°C and ∼1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ∼32.3 nm/°C and ∼24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.
【 授权许可】
CC BY
© 2014 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190022943ZK.pdf | 1118KB | download |