Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

Sensors

Bing-Yu Wang¹  Fan-Chun Hsieh²  Che-Yu Lin¹  Shao-En Chen¹  Fong-Zhi Chen² 

[1] Department of Mechanical Engineering, National Chung Hsing University, 250, Taichung 402, Taiwan; E-Mails:;Instrument Technology Research Center, National Applied Research Laboratories, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan; E-Mails:

关键词: vacuum pressure sensor;    viscous forces;    piezoelectric beam;   

DOI  :  10.3390/s141122099

来源: mdpi

【 摘 要 】

In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair. Because the viscous forces on the piezoelectric beam vary at different air pressures, the vibration of the beam depends on the vacuum pressure. The developed pressure sensor can sense a wide range of pressure, from 6.5 × 10⁻⁶ to 760 Torr. The experimental results showed that the output voltage is inversely proportional to the gas damping ratio, and thus, the vacuum pressure was estimated from the output voltage.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.