A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor

Sensors

Junwoo Lee¹  Wook Choi¹  Yong Kyoung Yoo¹  Kyo Seon Hwang²  Sang-Myung Lee³  Sungchul Kang²  Jinseok Kim² 

[1] Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea; E-Mails:;Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea; E-Mails:;Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea; E-Mail:

关键词: force sensor;    tactile sensor;    piezoelectric;    thin film;    MEMS;   

DOI  :  10.3390/s141222199

来源: mdpi

【 摘 要 】

The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.