Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

Sensors

Gabriel González¹  Eleazar Samuel Kolosovas-Machuca²  Edgar López-Luna²  Heber Hernández-Arriaga² 

[1] Cátedras Conacyt, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico; E-Mail:;Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico; E-Mails:

关键词: interdigital nanocapacitors;    finite element method;    capacitance;   

DOI  :  10.3390/s150101998

来源: mdpi

【 摘 要 】

In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO₂. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.