Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures

Micromachines

Nolwenn Huby³  John Bigeon³  Gwennaël Danion³  Jean-Luc Duvail²  Françis Gouttefangeas¹  Lo໼ Joanny¹  Bruno Bຬhe³ 

[1] ScanMAT–CMEBA, University of Rennes 1, Campus de Beaulieu, 35042 Rennes Cedex, France; E-Mails:;Institut des Matériaux de Nantes Jean Rouxel, Université de Nantes, CNRS UMR 6502, 44322 Nantes, France; E-Mail:;Institut de Physique de Rennes, Université de Rennes 1, CNRS UMR 6251, 35042 Rennes Cedex, France; E-Mails:

关键词: integrated photonics;    1D-nanostructures;    optical coupling;    transferable waveguide;    UV-lithography;    wetting template method;   

DOI  :  10.3390/mi6050544

来源: mdpi

【 摘 要 】

We report on optical components for integrated optics applications at the micro- and nanoscale. Versatile shapes and dimensions are achievable due to the liquid phase processability of SU8 resist. On the one hand, by adjusting the UV-lithography process, waveguiding structures are patterned and released from their original substrate. They can be replaced on any other substrate and also immerged in liquid wherein they still show off efficient light confinement. On the other hand, filled and hollow 1D-nanostructures are achievable by the wetting template method. By exploiting the large range of available SU8 viscosities, nanowires of diameter ranging between 50 nm and 240 nm, as well as nanotubes of controllable wall thickness are presented. Optical injection, propagation, and coupling in such nanostructures are relevant for highly integrated devices.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.