Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Sensors

Cheng-Hua Tsai¹  Chun-Wei Tsai¹  Hsu-Tang Chang²  Shih-Hsiang Liu²  Jui-Che Tsai¹ 

[1] Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan;

关键词: microelectromechanical devices;    electrothermal effects;    silicon on insulator;   

DOI  :  10.3390/s150614745

来源: mdpi

【 摘 要 】

Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.