Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

Sensors

Kwang Soo Yoo¹  Soo Deok Han²  Hi Gyu Moon²  Seok-Jin Yoon²  Chong-Yun Kang² 

[1] Department of Materials Science and Engineering, University of Seoul, 163, Seoulsiripdae-ro, Dongdaemun-gu, Seoul 130-743, Korea;Center for Electronic Materials, Korea Institute of Science and Technology, 5, Hwarang-ro 14-gil, Seongbuk-gu, Seoul 136-791, Korea ; E-Mails:

关键词: H₂S sensor;    nanosensor;    SnO₂ nanocolumn;    glancing angle deposition;   

DOI  :  10.3390/s150715468

来源: mdpi

【 摘 要 】

As highly sensitive H₂S gas sensors, Au- and Ag-catalyzed SnO₂ thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = R_gas/R_air) of Au and Ag-catalyzed SnO₂ sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H₂S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO₂ thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48).

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.